[DataSet] Version=2 GroupCount=2 Gr0-Name=Scan forward Gr0-ID=0 Gr0-Count=21 Gr1-Name=Scan backward Gr1-ID=0 Gr1-Count=21 Gr0-Ch0=DataSet-0:0 Gr0-Ch1=DataSet-0:1 Gr1-Ch0=DataSet-1:0 Gr1-Ch1=DataSet-1:1 SetInfos=DataSet-Info InfoSetCount=3 InfoSet0=DataSetInfos InfoSet1=Calibration InfoSet2=Parameters [DataSet-Info] -- Scan --=-------- Image size=18µm Scan direction=Up Time/Line=0,5 s Points=128 Lines=128 X-Slope=-2,63 ° Y-Slope=1,53 ° Rotation=0 ° X-Pos=19µm Y-Pos=-22µm Z-Plane=-0,82µm Overscan=5 % Const. Height-Mode=Disabled Date=22-03-2017 Time=15:33:59 -- Feedback --=-------- Setpoint=20nN P-Gain=10000 I-Gain=1000 D-Gain=0 Tip voltage=0nV Feedback mode=Free Feedback algo.=Adaptive PID Error range=20 V -- Global --=-------- Measurement environment=Air Op. mode=Static Force Cantilever type=CONTR Head type=EZ2-AFM Scan head=10-12-648.hed Laser working point=0.0% Deflection offset=0.0% Software ver.=3.1.0.22 Firmware ver.=3.1.3.13 Controller S/N=023-12-121 -- Module --=-------- Controller Board=2 AFM Basic Module=3 AFM Dynamic Module=0 AFM Extension Module=0 Video Module=0 Signal Module S=0 Signal Module A=0 USB Module=5 Nanosurf Report=6 Scripting Interface=0 Spectroscopy Module=0 Lithography Module=0 [DataSet\DataSetInfos] SubSectionCount=4 SubSection0=Scan SubSection1=Feedback SubSection2=Global SubSection3=Module [DataSet\DataSetInfos\Scan] SubSectionCount=0 Image size=18µm Scan direction=Up Time/Line=0,5 s Points=128 Lines=128 X-Slope=-2,63 ° Y-Slope=1,53 ° Rotation=0 ° X-Pos=19µm Y-Pos=-22µm Z-Plane=-0,82µm Overscan=5 % Const. Height-Mode=Disabled Date=22-03-2017 Time=15:33:59 [DataSet\DataSetInfos\Feedback] SubSectionCount=0 Setpoint=20nN P-Gain=10000 I-Gain=1000 D-Gain=0 Tip voltage=0nV Feedback mode=Free Feedback algo.=Adaptive PID Error range=20 V [DataSet\DataSetInfos\Global] SubSectionCount=0 Measurement environment=Air Op. mode=Static Force Cantilever type=CONTR Head type=EZ2-AFM Scan head=10-12-648.hed Laser working point=0.0% Deflection offset=0.0% Software ver.=3.1.0.22 Firmware ver.=3.1.3.13 Controller S/N=023-12-121 [DataSet\DataSetInfos\Module] SubSectionCount=0 Controller Board=2 AFM Basic Module=3 AFM Dynamic Module=0 AFM Extension Module=0 Video Module=0 Signal Module S=0 Signal Module A=0 USB Module=5 Nanosurf Report=6 Scripting Interface=0 Spectroscopy Module=0 Lithography Module=0 [DataSet\Calibration] SubSectionCount=2 SubSection0=Scanhead SubSection1=Cantilever [DataSet\Calibration\Scanhead] SubSectionCount=0 Version=5 HeadTyp=EZ2-AFM SerialNo=uncal 70u RevisionNo=2 ScanFit=Pomfit CtrlInPol=Positiv ZAxisPol=Negativ Ch0Corr=None SetPointCheck=None OutCount=7 Out0=8,DriveAmp,Excitation amplitude,V,5.3,0 Out1=7,AnalogOut3,User Output 2,V,10,0 Out2=6,AnalogOut2,User Output 1,V,10,0 Out3=4,AnalogOut0,Tip voltage,V,10,0 Out4=2,ScanAxis2,Z-Axis,m,7.9e-006,0 Out5=1,ScanAxis1,Y-Axis,m,3.9085e-005,0 Out6=0,ScanAxis0,X-Axis,m,3.703e-005,0 InCount=19 In0=10,User Input1,User input 2,V,10,0 In1=9,User Input0,User input 1,V,10,0 In2=11,HeadSig2,Not defined 1,V,10,0 In3=8,Lever Current,Tip current,A,0.0001,0 In4=7,TipPhase,Phase,°,90,0 In5=6,TipSignalAC,Amplitude,V,10,0 In6=5,TipSignalDC,Deflection,m,8.62e-006,0 In7=13,Channel6,User input 2,V,10,0 In8=12,Channel5,User input 1,V,10,0 In9=4,Channel4,Tip current,A,0.0001,0 In10=3,Channel3,Not defined 1,V,10,0 In11=2,Channel2,Amplitude,V,5,0 In12=1,Channel1,Topography,m,7.9e-006,0 In13=0,Channel0,Deflection,V,10,0 In14=19,SensorSignal2,SensorSignal,A,0.0005,0 In15=18,SensorSignal1,SensorSignal,W,0.005,0 In16=17,TipSignalDC2,Deflection,N,1,0 In17=16,TipSignalDC1,Deflection,V,10,0 In18=20,Channel7,Z-Axis,m,7.9e-006,0 ScanCorrCount=1 ScanCorrA=-1.824e-006 ScanCorrB=0 ScanCorrC=0 ScanCorrD=0 ScanCorrE=-3.286e-006 ScanCorrF=1.736e-006 ScanCorrG=-7.543e-009 ScanCorrH=-8.617e-009 ScanCorrI=7.083e-009 ScanCorrJ=5.556e-009 ScanCorrK=2.484e-011 ScanCorrL=3.37e-011 ScanCorrM=-3.489e-012 ScanCorrN=-1.103e-011 ScanCorrO=-3.146e-012 ScanCorrTableRot=0 ScanCorrRotX=0.0907572 ScanCorrRotY=-0.026878 ScanScaleZ=4681.1 ScanScaleXY=256 ZRangeFit=None ZRangeCorrCount=1 ZRangeCorrA=1 ZRangeCorrB=0 ZRangeCorrC=0 ZRangeCorrD=0 ApproachStartPos=0 MaxApproachSpeed=1 ManualMoveSpeed=1 DefaultDynRefAmp=0.25 DefaultDynRefAmpLiquid=0.2 DefaultForceModRefAmp=1 DetectorABGainAC=0.5 CompDcWithZ=0 VideoSupport=1 SensorStatusMode=1 SensorStatusPol=Negativ SensorStatusMeterRange=0.0866142;0.102362;0.102362;0.811024;0.811024;0.913386 LaserWavelength=0 [DataSet\Calibration\Cantilever] SubSectionCount=0 Version=2 GUID={89E92173-96FB-4ff9-94D8-42296D00D980} Name=CONTR Manufacturer=Nanosensors PropCount=7 Prop0=D[0.2]*[N/m] Prop1=D[13000]*[Hz] Prop2=D[0.00045]*[m] Prop3=D[5e-005]*[m] Prop4=D[50]*[] Prop5=D[4000]*[Hz] Prop6=D[5]*[] [DataSet\Parameters] SubSectionCount=7 SubSection0=Approach SubSection1=ZFeedback SubSection2=Lithography SubSection3=Imaging SubSection4=SignalIO SubSection5=Spectroscopy SubSection6=SPMSystem [DataSet\Parameters\Approach] SubSectionCount=0 ApproachSteps=L[65000]*[] WithdrawSteps=L[1000]*[] AutoPeriode=D[0.02]*[s] MovePeriode=D[0.02]*[s] StepSlope=L[6]*[] AutoStartScan=B[0]*[] AutoReloadParameter=B[0]*[] AutoReloadWorkspace=B[0]*[] ApproachSpeed=D[0.0801099]*[] ManualSpeed=D[1]*[] ApproachThreshold=D[0.01]*[] AFMApproachMode=L[0]*[] AFMStepByStepSpeed=D[1]*[] AFMStepByStepSlope=D[5e-006]*[m/s] [DataSet\Parameters\ZFeedback] SubSectionCount=0 PGain=L[10000]*[] IGain=L[1000]*[] DGain=L[0]*[] SetPoint=D[1.99933e-008]*[N] SetPointForce=D[1.99933e-008]*[N] SetPointDC=D[1e-009]*[m] SetPointAmp=D[50]*[%] SetPointPhase=D[1]*[°] SetPointAProbe=D[25]*[%] SetPointForceUnitMode=L[2]*[] SetPointForce_V=D[0.273]*[] SetPointForce_m=D[0.0001]*[] SetPointForce_N=D[1.99933e-008]*[] ChGainRegError=L[0]*[] PosErrorMult=L[1]*[] FeedbackMode=L[0]*[] Algorithm=L[1]*[] RefFrq=D[179239]*[Hz] RefAmplitude=D[0.530049]*[V] RefPhase=D[112.088]*[°] CoarseSweepStartFrq=D[9100]*[] CoarseSweepEndFrq=D[16900]*[] CoarseSweepStepFrq=D[100.002]*[] FineSweepStartFrq=D[130000]*[] FineSweepEndFrq=D[210000]*[] FineSweepStepFrq=D[100]*[] ManualSweepStartFrq=D[130000]*[] ManualSweepEndFrq=D[210000]*[] ManualSweepStepFrq=D[100]*[] AutoCalFrqPeak=B[1]*[] AutoCalPhase=B[1]*[] DynamicAmp=D[0.200049]*[V] CalRefPlotGraph=B[0]*[] ForceModFrq=D[20000]*[Hz] ForceModAmp=D[4]*[V] AutoFrqSweepRange=B[1]*[] AmpCtrlMode=L[0]*[] AmpCtrlPGain=L[150000]*[] AmpCtrlIGain=L[150000]*[] PLLBandwith=L[2]*[] PLLLockrange=L[2]*[] FrqPeakReduceAir=D[20]*[%] FrqPeakUpperSideAir=B[1]*[] FrqPeakReduceLiquid=D[5]*[%] FrqPeakUpperSideLiquid=B[0]*[] RegMoveMode=L[0]*[] [DataSet\Parameters\Lithography] SubSectionCount=0 ModuleLevel=L[0]*[] OpMode=L[2]*[] InactivePenMode=L[0]*[] AutoChartSettings=B[1]*[] AutoCapture=B[1]*[] [DataSet\Parameters\Imaging] SubSectionCount=0 ModuleLevel=L[1]*[] ScanRange=V[1.77734e-005,1.77734e-005,0]*[m,m,m] ScanOffset=V[1.94851e-005,-2.15165e-005,-8.24692e-007]*[m,m,m] ScanRotation=V[1.52787,-2.63381,0]*[°,°,°] ScanTime=V[0.497078,0.497078,0]*[s,s,s] Datapoints=V[128,128,0]*[,,] MeasureMask=L[3]*[] ScanMode=L[0]*[] OverScanSize=D[5]*[%] FirstScanlineRep=L[1]*[] SyncOutMode=L[0]*[] LineMode=L[0]*[] RelTipPos=D[-3.27949e-007]*[m] AutoSlopeCorrection=B[0]*[] AutoDeleteBuffer=B[1]*[] AutoChartSettings=B[1]*[] AutoCapture=B[1]*[] [DataSet\Parameters\SignalIO] SubSectionCount=0 UserDAC0=D[0]*[V] UserDAC1=D[0]*[V] EnableUserADC0=B[0]*[] EnableUserADC1=B[0]*[] TipSignalMode=L[0]*[] ExcitationMode=L[0]*[] User0CtrlMode=L[0]*[] User0InputPol=L[0]*[] User0OutputFlag=L[0]*[] User0SetPoint=D[0]*[V] User0IGain=L[1000]*[] [DataSet\Parameters\Spectroscopy] SubSectionCount=0 ModuleLevel=L[0]*[] SpecPoints=L[1]*[] OutputType=L[0]*[] Averages=L[1]*[] FwModTime=D[1]*[s] BwModTime=D[1]*[s] ModRelValue=B[1]*[] FwModDatapoints=L[1024]*[] BwModDatapoints=L[1024]*[] SyncOutMode=L[0]*[] FeedbackActive=B[0]*[] AutoChartSettings=B[1]*[] AutoCapture=B[1]*[] StartOffset=D[-5.72715e-007]*[m] SpecEndMode=L[1]*[] FwModRange=D[9.45455e-007]*[m] BwModRange=D[-9.45455e-007]*[m] FwMoveSpeed=D[9.45455e-007]*[m/s] BwMoveSpeed=D[9.45455e-007]*[m/s] FwSamplingRate=D[1024]*[Hz] BwSamplingRate=D[1024]*[Hz] FwModMode=L[0]*[] BwModMode=L[0]*[] FwModStopValue=D[0]*[V] BwModStopValue=D[0]*[V] FwModStopMode=L[1]*[] BwModStopMode=L[1]*[] FwPauseTime=D[0]*[s] BwPauseTime=D[0]*[s] FwPauseDatapoints=L[0]*[] BwPauseDatapoints=L[0]*[] FwPauseMode=L[0]*[] BwPauseMode=L[0]*[] AutoRecalibrateProbe=B[0]*[] [DataSet\Parameters\SPMSystem] SubSectionCount=0 AOut0=D[0]*[V] AOut1=D[0]*[] VideoSource=L[0]*[] SPMMode=L[2]*[] VideoTopLight=D[100]*[%] VideoSideLight=D[100]*[%] VideoTopBrightness=D[80]*[] VideoSideBrightness=D[80]*[] VideoTopContrast=D[70]*[] VideoSideContrast=D[70]*[] FlexVideoTopExpTime=L[60]*[] FlexVideoSideExpTime=L[60]*[] FlexVideoTopGain=L[8]*[] FlexVideoSideGain=L[8]*[] FlexVideoTopADCLevel=L[2]*[] FlexVideoSideADCLevel=L[2]*[] FlexVideoTopRatioR=D[1]*[] FlexVideoSideRatioR=D[1]*[] FlexVideoTopRatioG=D[1]*[] FlexVideoSideRatioG=D[1]*[] FlexVideoTopRatioB=D[1]*[] FlexVideoSideRatioB=D[1]*[] FlexVideoTopRatioGamma=D[1]*[] FlexVideoSideRatioGamma=D[1]*[] FlexVideoTopAutoLevels=B[1]*[] FlexVideoSideAutoLevels=B[1]*[] HighResVideoTopExpTime=L[60]*[] HighResVideoSideExpTime=L[60]*[] HighResVideoTopGain=L[25]*[] HighResVideoSideGain=L[8]*[] HighResVideoTopADCLevel=L[2]*[] HighResVideoSideADCLevel=L[2]*[] HighResVideoTopRatioR=D[1]*[] HighResVideoSideRatioR=D[1]*[] HighResVideoTopRatioG=D[0.8]*[] HighResVideoSideRatioG=D[1]*[] HighResVideoTopRatioB=D[0.8]*[] HighResVideoSideRatioB=D[1]*[] HighResVideoTopRatioGamma=D[0.9]*[] HighResVideoSideRatioGamma=D[1]*[] HighResVideoTopAutoLevels=B[1]*[] HighResVideoSideAutoLevels=B[1]*[] ActiveSensorByGUID=S[{89E92173-96FB-4ff9-94D8-42296D00D980}]*[] MeasEnv=L[0]*[] ProbeStatusType=L[3]*[] EnableProbeStatus=B[1]*[] SysStateIdleZMode=L[0]*[] SysStateIdleXYMode=L[0]*[] [DataSet-0:0] Version=2 Points=128 Lines=128 Frame=Scan forward CurLine=127 Dim0Name=X* Dim0Unit=m Dim0Range=1.77734e-005 Dim0Min=0 Dim1Name=Y* Dim1Unit=m Dim1Range=1.77734e-005 Dim1Min=0 Dim2Name=Deflection Dim2Unit=V Dim2Range=20 Dim2Min=-10 SaveMode=Binary SaveBits=16 SaveSign=Signed SaveOrder=Intel [DataSet-0:1] Version=2 Points=128 Lines=128 Frame=Scan forward CurLine=127 Dim0Name=X* Dim0Unit=m Dim0Range=1.77734e-005 Dim0Min=0 Dim1Name=Y* Dim1Unit=m Dim1Range=1.77734e-005 Dim1Min=0 Dim2Name=Topography Dim2Unit=m Dim2Range=1.58e-005 Dim2Min=-7.9e-006 SaveMode=Binary SaveBits=16 SaveSign=Signed SaveOrder=Intel [DataSet-1:0] Version=2 Points=128 Lines=128 Frame=Scan backward CurLine=127 Dim0Name=X* Dim0Unit=m Dim0Range=1.77734e-005 Dim0Min=0 Dim1Name=Y* Dim1Unit=m Dim1Range=1.77734e-005 Dim1Min=0 Dim2Name=Deflection Dim2Unit=V Dim2Range=20 Dim2Min=-10 SaveMode=Binary SaveBits=16 SaveSign=Signed SaveOrder=Intel [DataSet-1:1] Version=2 Points=128 Lines=128 Frame=Scan backward CurLine=127 Dim0Name=X* Dim0Unit=m Dim0Range=1.77734e-005 Dim0Min=0 Dim1Name=Y* Dim1Unit=m Dim1Range=1.77734e-005 Dim1Min=0 Dim2Name=Topography Dim2Unit=m Dim2Range=1.58e-005 Dim2Min=-7.9e-006 SaveMode=Binary SaveBits=16 SaveSign=Signed SaveOrder=Intel [SetView] ViewWidth=666 ViewHeight=528 ViewCount=4 View0=SetView-View0 View1=SetView-View1 View2=SetView-View2 View3=SetView-View3 [SetView-View0] ViewTyp=1 LineOp=2 Channel=1 Frame=0 ZRange=-523,938 ViewSize=256 ViewMode=0 GraphMode=1 AspectRatio=0 AutoZRange=1 ParCount=3 Par0=1,Shading,0 Par1=1,DeltaGain,5 Par2=1,Smooth,0 [SetView-View1] ViewTyp=0 LineOp=1 Channel=1 Frame=0 ZRange=-4546,1157 ViewSize=256 ViewMode=0 GraphMode=1 AspectRatio=0 AutoZRange=1 ParCount=1 Par0=0,ReverseLine,1 [SetView-View2] ViewTyp=1 LineOp=2 Channel=0 Frame=0 ZRange=-97,96 ViewSize=256 ViewMode=0 GraphMode=1 AspectRatio=0 AutoZRange=1 ParCount=3 Par0=1,Shading,0 Par1=1,DeltaGain,5 Par2=1,Smooth,0 [SetView-View3] ViewTyp=0 LineOp=1 Channel=0 Frame=0 ZRange=-1029,1807 ViewSize=256 ViewMode=0 GraphMode=1 AspectRatio=0 AutoZRange=1 ParCount=1 Par0=0,ReverseLine,1 #!Ž|eT|…‰ˆnkrrri|€lmw|k~{ut~zy†llrxd€vsz„ˆw~{trŸ‡oWanz|lqsmspy{{z~wquyqv‚š‚yqusrv}ƒ‡{{ojo„pvfr{lx|p`[n›š|spawttlc„xkkabUH£{`Thqxuvyzmkenl|sz{‡‚~nspszn€ˆuƒpzxr~ljxyy~}†}„€eenl{vy|tgpto{yv~~Š{rqn`x‚‹–rwiy†xtƒyu€|nsi{uhkq†~}~hbXh€…}zssowtqrlqqutvh_N“|b[cnjvzp}pi{bqerr{†‚ƒz~†omsu}xry{‚pt{zx€sy€u…koryvz|iqwwqmslll……„ƒn~Njkv{—™‚vvpwu|uzwupot€txxw}xwŠtfVXy“{gqpyojj‚turqro]MwuXZjpnxrrhsw}soxslqvtw~w|…}prs~vpu{xyzrƒ†{‚{ui_]k‡Œ“‡€wnLMW™£™‡kdLLa‚œ¤¢•kcN^qŠ¡™sn]Zol~Ž“|gwrxjr€xgS]v•‘nmphrlf^s›VnurTDvnfgfurujv{pjvnu{vywutpr‚€ttjumnx~xuuz‚Œ„|ttw|qvtvxz}sjust|‚zoj}svr{uuw{}Š“kpnyustnx‚rqy||z‡}lx|„ohktdf_j…›•y‚qfcoy€b`ñœÿPvkhaxqjrjrfprdoswƒ…~‹|yrnffp~tr|yx{svojuqw„{t„|zqvuxz|€yynpfˆwvsluzuy†styt{„wnv{yuƒ}qrwwip~x€~v}}}ymshgdYdƒ”š‚|uxnlkxkpes„w†{\Fp|ihsrxlujjx}†‰x„|kjuczuwurousutrvgrx||~{uoriqtz€tv{}qtzoxxzqx{qq|Šˆy{ey}bnty{}w‚wqrturro{v{ztl]Wifœ§’‰ruirllkysmw€{voRLppki}okertolx‡†…‡}~jihqurrvwnu{xy|qxorqzx{{rqoutswy}i|qzvxttnurv~Žy†s{sxoq{…‡{|kph~rppurutz~w`kfk[ag ”ˆxvewlrƒ{puqxpn_XUj`a_|paq€zmˆ~˜xkkyxlvXx|‡ƒ}kgnkuihnˆsƒ€|uvu{jxksywm‚|†{v||_gjbkq}‹™~ƒ„}tqpnou€‡Xoysx~{raoprrrcidkrRv¡¸‚|zp`lu|‰zssy{rfWMitiubtriejnrr…“v†syy~mox€|ytir‰krw~oov‡ry|qi}v}knyvw‹y}xtsdfjqlv‚†ƒ|p}‡|zs|ydbqxr…„wghtsuxuqil\iaVp²±ˆ„€o_ctw‚ŽkspUKIi‚~‹orpqivelc|‰‹„yolz|tvct{ƒ}vvwruvqs}pr{wxyonu{v†um€z‘txyrmrjdkrz„…ptz|w†ƒ€qx`br|y„zrznfrzqupnoo_cELq§ÁŸˆ€ihVkxz†~zp`V!U‰¢’…wpn„typly|xtrju}m`ty€‚rydnfr~y{€mst‡ƒohgpvt|tƒ~‚y…zwxkdakhfpty‰Š–“|rjorqz‚y~‚psuyx€‰sjalrn€ttutfS><tÁà®—€vm_]uqsvoV;)k–«ï·jqspkuy€}z…|sonlljcj€ˆz~y€z~stvpqoqx†‚uy€uwyftuzt||}uzxtpq_ddh~swŠ“†ƒ}po€ukxrwls…‹„{ychowvwqwtd[Z'a¤ãÚÃŒc\YZkqnq‡zL0Uw¼Â?åÁŒ‡|uixsrwpr{jq~p{ne}{sŠvft|xy‰qynls€ouxpoqz|x…qntwrkszxhd\qwŠ˜‘”‡ƒ‡lq~tpwyot…ugz_npmu}…‰_`\D/'U—ºæÙªrlGYuftcs„lL?a—³¤ŸW¢§tk{f‰opdthcjxsx‚|pkgxnlqbxs{wŒv{xukqsgrqkrrŠ}tuwvujqnslmbn}‚Ž„¡Š|’bgk…l|st{“woUiH_cy{‰J49bt¡ÐᶃeUSg„Œ†s}…}_1AV™³²Ô±„@ì¯xlxvvxu}x‚ka€dpu}gmvuwmyztsjrx„€smstvˆˆvvr~idu{wqvƒtugs{vusyfu‡™Œ}€wvlxqluoog€|gZOPTXv†‰—…yR 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