[DataSet] Version=2 GroupCount=2 Gr0-Name=Scan forward Gr0-ID=0 Gr0-Count=21 Gr1-Name=Scan backward Gr1-ID=0 Gr1-Count=21 Gr0-Ch0=DataSet-0:0 Gr0-Ch1=DataSet-0:1 Gr1-Ch0=DataSet-1:0 Gr1-Ch1=DataSet-1:1 SetInfos=DataSet-Info InfoSetCount=3 InfoSet0=DataSetInfos InfoSet1=Calibration InfoSet2=Parameters [DataSet-Info] -- Scan --=-------- Image size=9,7m Scan direction=Up Time/Line=0,5 s Points=128 Lines=128 X-Slope=-1,32 Y-Slope=3,74 Rotation=0 X-Pos=-1,5m Y-Pos=4,2m Z-Plane=0,31m Overscan=5 % Const. Height-Mode=Disabled Date=22-03-2017 Time=12:53:02 -- Feedback --=-------- Setpoint=20nN P-Gain=10000 I-Gain=1000 D-Gain=0 Tip voltage=0nV Feedback mode=Free Feedback algo.=Adaptive PID Error range=20 V -- Global --=-------- Measurement environment=Air Op. mode=Static Force Cantilever type=CONTR Head type=EZ2-AFM Scan head=10-12-648.hed Laser working point=0.0% Deflection offset=0.0% Software ver.=3.1.0.22 Firmware ver.=3.1.3.13 Controller S/N=023-12-121 -- Module --=-------- Controller Board=2 AFM Basic Module=3 AFM Dynamic Module=0 AFM Extension Module=0 Video Module=0 Signal Module S=0 Signal Module A=0 USB Module=5 Nanosurf Report=6 Scripting Interface=0 Spectroscopy Module=0 Lithography Module=0 [DataSet\DataSetInfos] SubSectionCount=4 SubSection0=Scan SubSection1=Feedback SubSection2=Global SubSection3=Module [DataSet\DataSetInfos\Scan] SubSectionCount=0 Image size=9,7m Scan direction=Up Time/Line=0,5 s Points=128 Lines=128 X-Slope=-1,32 Y-Slope=3,74 Rotation=0 X-Pos=-1,5m Y-Pos=4,2m Z-Plane=0,31m Overscan=5 % Const. Height-Mode=Disabled Date=22-03-2017 Time=12:53:02 [DataSet\DataSetInfos\Feedback] SubSectionCount=0 Setpoint=20nN P-Gain=10000 I-Gain=1000 D-Gain=0 Tip voltage=0nV Feedback mode=Free Feedback algo.=Adaptive PID Error range=20 V [DataSet\DataSetInfos\Global] SubSectionCount=0 Measurement environment=Air Op. mode=Static Force Cantilever type=CONTR Head type=EZ2-AFM Scan head=10-12-648.hed Laser working point=0.0% Deflection offset=0.0% Software ver.=3.1.0.22 Firmware ver.=3.1.3.13 Controller S/N=023-12-121 [DataSet\DataSetInfos\Module] SubSectionCount=0 Controller Board=2 AFM Basic Module=3 AFM Dynamic Module=0 AFM Extension Module=0 Video Module=0 Signal Module S=0 Signal Module A=0 USB Module=5 Nanosurf Report=6 Scripting Interface=0 Spectroscopy Module=0 Lithography Module=0 [DataSet\Calibration] SubSectionCount=2 SubSection0=Scanhead SubSection1=Cantilever [DataSet\Calibration\Scanhead] SubSectionCount=0 Version=5 HeadTyp=EZ2-AFM SerialNo=uncal 70u RevisionNo=2 ScanFit=Pomfit CtrlInPol=Positiv ZAxisPol=Negativ Ch0Corr=None SetPointCheck=None OutCount=7 Out0=8,DriveAmp,Excitation amplitude,V,5.3,0 Out1=7,AnalogOut3,User Output 2,V,10,0 Out2=6,AnalogOut2,User Output 1,V,10,0 Out3=4,AnalogOut0,Tip voltage,V,10,0 Out4=2,ScanAxis2,Z-Axis,m,7.9e-006,0 Out5=1,ScanAxis1,Y-Axis,m,3.9085e-005,0 Out6=0,ScanAxis0,X-Axis,m,3.703e-005,0 InCount=19 In0=10,User Input1,User input 2,V,10,0 In1=9,User Input0,User input 1,V,10,0 In2=11,HeadSig2,Not defined 1,V,10,0 In3=8,Lever Current,Tip current,A,0.0001,0 In4=7,TipPhase,Phase,,90,0 In5=6,TipSignalAC,Amplitude,V,10,0 In6=5,TipSignalDC,Deflection,m,8.62e-006,0 In7=13,Channel6,User input 2,V,10,0 In8=12,Channel5,User input 1,V,10,0 In9=4,Channel4,Tip current,A,0.0001,0 In10=3,Channel3,Not defined 1,V,10,0 In11=2,Channel2,Amplitude,V,5,0 In12=1,Channel1,Topography,m,7.9e-006,0 In13=0,Channel0,Deflection,V,10,0 In14=19,SensorSignal2,SensorSignal,A,0.0005,0 In15=18,SensorSignal1,SensorSignal,W,0.005,0 In16=17,TipSignalDC2,Deflection,N,1,0 In17=16,TipSignalDC1,Deflection,V,10,0 In18=20,Channel7,Z-Axis,m,7.9e-006,0 ScanCorrCount=1 ScanCorrA=-1.824e-006 ScanCorrB=0 ScanCorrC=0 ScanCorrD=0 ScanCorrE=-3.286e-006 ScanCorrF=1.736e-006 ScanCorrG=-7.543e-009 ScanCorrH=-8.617e-009 ScanCorrI=7.083e-009 ScanCorrJ=5.556e-009 ScanCorrK=2.484e-011 ScanCorrL=3.37e-011 ScanCorrM=-3.489e-012 ScanCorrN=-1.103e-011 ScanCorrO=-3.146e-012 ScanCorrTableRot=0 ScanCorrRotX=0.0907572 ScanCorrRotY=-0.026878 ScanScaleZ=4681.1 ScanScaleXY=256 ZRangeFit=None ZRangeCorrCount=1 ZRangeCorrA=1 ZRangeCorrB=0 ZRangeCorrC=0 ZRangeCorrD=0 ApproachStartPos=0 MaxApproachSpeed=1 ManualMoveSpeed=1 DefaultDynRefAmp=0.25 DefaultDynRefAmpLiquid=0.2 DefaultForceModRefAmp=1 DetectorABGainAC=0.5 CompDcWithZ=0 VideoSupport=1 SensorStatusMode=1 SensorStatusPol=Negativ SensorStatusMeterRange=0.0866142;0.102362;0.102362;0.811024;0.811024;0.913386 LaserWavelength=0 [DataSet\Calibration\Cantilever] SubSectionCount=0 Version=2 GUID={89E92173-96FB-4ff9-94D8-42296D00D980} Name=CONTR Manufacturer=Nanosensors PropCount=7 Prop0=D[0.2]*[N/m] Prop1=D[13000]*[Hz] Prop2=D[0.00045]*[m] Prop3=D[5e-005]*[m] Prop4=D[50]*[] Prop5=D[4000]*[Hz] Prop6=D[5]*[] [DataSet\Parameters] SubSectionCount=7 SubSection0=Approach SubSection1=ZFeedback SubSection2=Lithography SubSection3=Imaging SubSection4=SignalIO SubSection5=Spectroscopy SubSection6=SPMSystem [DataSet\Parameters\Approach] SubSectionCount=0 ApproachSteps=L[65000]*[] WithdrawSteps=L[1000]*[] AutoPeriode=D[0.02]*[s] MovePeriode=D[0.02]*[s] StepSlope=L[6]*[] AutoStartScan=B[0]*[] AutoReloadParameter=B[0]*[] AutoReloadWorkspace=B[0]*[] ApproachSpeed=D[0.0801099]*[] ManualSpeed=D[1]*[] ApproachThreshold=D[0.01]*[] AFMApproachMode=L[0]*[] AFMStepByStepSpeed=D[1]*[] AFMStepByStepSlope=D[5e-006]*[m/s] [DataSet\Parameters\ZFeedback] SubSectionCount=0 PGain=L[10000]*[] IGain=L[1000]*[] DGain=L[0]*[] SetPoint=D[1.99933e-008]*[N] SetPointForce=D[1.99933e-008]*[N] SetPointDC=D[1e-009]*[m] SetPointAmp=D[50]*[%] SetPointPhase=D[1]*[] SetPointAProbe=D[25]*[%] SetPointForceUnitMode=L[2]*[] SetPointForce_V=D[0.273]*[] SetPointForce_m=D[0.0001]*[] SetPointForce_N=D[1.99933e-008]*[] ChGainRegError=L[0]*[] PosErrorMult=L[1]*[] FeedbackMode=L[0]*[] Algorithm=L[1]*[] RefFrq=D[179239]*[Hz] RefAmplitude=D[0.530049]*[V] RefPhase=D[112.088]*[] CoarseSweepStartFrq=D[9100]*[] CoarseSweepEndFrq=D[16900]*[] CoarseSweepStepFrq=D[100.002]*[] FineSweepStartFrq=D[130000]*[] FineSweepEndFrq=D[210000]*[] FineSweepStepFrq=D[100]*[] ManualSweepStartFrq=D[130000]*[] ManualSweepEndFrq=D[210000]*[] ManualSweepStepFrq=D[100]*[] AutoCalFrqPeak=B[1]*[] AutoCalPhase=B[1]*[] DynamicAmp=D[0.200049]*[V] CalRefPlotGraph=B[0]*[] ForceModFrq=D[20000]*[Hz] ForceModAmp=D[4]*[V] AutoFrqSweepRange=B[1]*[] AmpCtrlMode=L[0]*[] AmpCtrlPGain=L[150000]*[] AmpCtrlIGain=L[150000]*[] PLLBandwith=L[2]*[] PLLLockrange=L[2]*[] FrqPeakReduceAir=D[20]*[%] FrqPeakUpperSideAir=B[1]*[] FrqPeakReduceLiquid=D[5]*[%] FrqPeakUpperSideLiquid=B[0]*[] RegMoveMode=L[0]*[] [DataSet\Parameters\Lithography] SubSectionCount=0 ModuleLevel=L[0]*[] OpMode=L[2]*[] InactivePenMode=L[0]*[] AutoChartSettings=B[1]*[] AutoCapture=B[1]*[] [DataSet\Parameters\Imaging] SubSectionCount=0 ModuleLevel=L[1]*[] ScanRange=V[9.71189e-006,9.80534e-006,0]*[m,m,m] ScanOffset=V[-1.51739e-006,4.15346e-006,3.06237e-007]*[m,m,m] ScanRotation=V[3.73535,-1.32407,0]*[,,] ScanTime=V[0.499491,0.499491,0]*[s,s,s] Datapoints=V[128,128,0]*[,,] MeasureMask=L[3]*[] ScanMode=L[0]*[] OverScanSize=D[5]*[%] FirstScanlineRep=L[1]*[] SyncOutMode=L[0]*[] LineMode=L[0]*[] RelTipPos=D[-3.27949e-007]*[m] AutoSlopeCorrection=B[0]*[] AutoDeleteBuffer=B[1]*[] AutoChartSettings=B[1]*[] AutoCapture=B[1]*[] [DataSet\Parameters\SignalIO] SubSectionCount=0 UserDAC0=D[0]*[V] UserDAC1=D[0]*[V] EnableUserADC0=B[0]*[] EnableUserADC1=B[0]*[] TipSignalMode=L[0]*[] ExcitationMode=L[0]*[] User0CtrlMode=L[0]*[] User0InputPol=L[0]*[] User0OutputFlag=L[0]*[] User0SetPoint=D[0]*[V] User0IGain=L[1000]*[] [DataSet\Parameters\Spectroscopy] SubSectionCount=0 ModuleLevel=L[0]*[] SpecPoints=L[1]*[] OutputType=L[0]*[] Averages=L[1]*[] FwModTime=D[1]*[s] BwModTime=D[1]*[s] ModRelValue=B[1]*[] FwModDatapoints=L[1024]*[] BwModDatapoints=L[1024]*[] SyncOutMode=L[0]*[] FeedbackActive=B[0]*[] AutoChartSettings=B[1]*[] AutoCapture=B[1]*[] StartOffset=D[-5.72715e-007]*[m] SpecEndMode=L[1]*[] FwModRange=D[9.45455e-007]*[m] BwModRange=D[-9.45455e-007]*[m] FwMoveSpeed=D[9.45455e-007]*[m/s] BwMoveSpeed=D[9.45455e-007]*[m/s] FwSamplingRate=D[1024]*[Hz] BwSamplingRate=D[1024]*[Hz] FwModMode=L[0]*[] BwModMode=L[0]*[] FwModStopValue=D[0]*[V] BwModStopValue=D[0]*[V] FwModStopMode=L[1]*[] BwModStopMode=L[1]*[] FwPauseTime=D[0]*[s] BwPauseTime=D[0]*[s] FwPauseDatapoints=L[0]*[] BwPauseDatapoints=L[0]*[] FwPauseMode=L[0]*[] BwPauseMode=L[0]*[] AutoRecalibrateProbe=B[0]*[] [DataSet\Parameters\SPMSystem] SubSectionCount=0 AOut0=D[0]*[V] AOut1=D[0]*[] VideoSource=L[0]*[] SPMMode=L[2]*[] VideoTopLight=D[100]*[%] VideoSideLight=D[100]*[%] VideoTopBrightness=D[80]*[] VideoSideBrightness=D[80]*[] VideoTopContrast=D[70]*[] VideoSideContrast=D[70]*[] FlexVideoTopExpTime=L[60]*[] FlexVideoSideExpTime=L[60]*[] FlexVideoTopGain=L[8]*[] FlexVideoSideGain=L[8]*[] FlexVideoTopADCLevel=L[2]*[] FlexVideoSideADCLevel=L[2]*[] FlexVideoTopRatioR=D[1]*[] FlexVideoSideRatioR=D[1]*[] FlexVideoTopRatioG=D[1]*[] FlexVideoSideRatioG=D[1]*[] FlexVideoTopRatioB=D[1]*[] FlexVideoSideRatioB=D[1]*[] FlexVideoTopRatioGamma=D[1]*[] FlexVideoSideRatioGamma=D[1]*[] FlexVideoTopAutoLevels=B[1]*[] FlexVideoSideAutoLevels=B[1]*[] HighResVideoTopExpTime=L[60]*[] HighResVideoSideExpTime=L[60]*[] HighResVideoTopGain=L[25]*[] HighResVideoSideGain=L[8]*[] HighResVideoTopADCLevel=L[2]*[] HighResVideoSideADCLevel=L[2]*[] HighResVideoTopRatioR=D[1]*[] HighResVideoSideRatioR=D[1]*[] HighResVideoTopRatioG=D[0.8]*[] HighResVideoSideRatioG=D[1]*[] HighResVideoTopRatioB=D[0.8]*[] HighResVideoSideRatioB=D[1]*[] HighResVideoTopRatioGamma=D[0.9]*[] HighResVideoSideRatioGamma=D[1]*[] HighResVideoTopAutoLevels=B[1]*[] HighResVideoSideAutoLevels=B[1]*[] ActiveSensorByGUID=S[{89E92173-96FB-4ff9-94D8-42296D00D980}]*[] MeasEnv=L[0]*[] ProbeStatusType=L[3]*[] EnableProbeStatus=B[1]*[] SysStateIdleZMode=L[0]*[] SysStateIdleXYMode=L[0]*[] [DataSet-0:0] Version=2 Points=128 Lines=128 Frame=Scan forward CurLine=127 Dim0Name=X* Dim0Unit=m Dim0Range=9.71189e-006 Dim0Min=0 Dim1Name=Y* Dim1Unit=m Dim1Range=9.80534e-006 Dim1Min=0 Dim2Name=Deflection Dim2Unit=V Dim2Range=20 Dim2Min=-10 SaveMode=Binary SaveBits=16 SaveSign=Signed SaveOrder=Intel [DataSet-0:1] Version=2 Points=128 Lines=128 Frame=Scan forward CurLine=127 Dim0Name=X* Dim0Unit=m Dim0Range=9.71189e-006 Dim0Min=0 Dim1Name=Y* Dim1Unit=m Dim1Range=9.80534e-006 Dim1Min=0 Dim2Name=Topography Dim2Unit=m Dim2Range=1.58e-005 Dim2Min=-7.9e-006 SaveMode=Binary SaveBits=16 SaveSign=Signed SaveOrder=Intel [DataSet-1:0] Version=2 Points=128 Lines=128 Frame=Scan backward CurLine=127 Dim0Name=X* Dim0Unit=m Dim0Range=9.71189e-006 Dim0Min=0 Dim1Name=Y* Dim1Unit=m Dim1Range=9.80534e-006 Dim1Min=0 Dim2Name=Deflection Dim2Unit=V Dim2Range=20 Dim2Min=-10 SaveMode=Binary SaveBits=16 SaveSign=Signed SaveOrder=Intel [DataSet-1:1] Version=2 Points=128 Lines=128 Frame=Scan backward CurLine=127 Dim0Name=X* Dim0Unit=m Dim0Range=9.71189e-006 Dim0Min=0 Dim1Name=Y* Dim1Unit=m Dim1Range=9.80534e-006 Dim1Min=0 Dim2Name=Topography Dim2Unit=m Dim2Range=1.58e-005 Dim2Min=-7.9e-006 SaveMode=Binary SaveBits=16 SaveSign=Signed SaveOrder=Intel [SetView] ViewWidth=666 ViewHeight=528 ViewCount=4 View0=SetView-View0 View1=SetView-View1 View2=SetView-View2 View3=SetView-View3 [SetView-View0] ViewTyp=1 LineOp=2 Channel=1 Frame=0 ZRange=-46,77 ViewSize=256 ViewMode=0 GraphMode=1 AspectRatio=0 AutoZRange=1 ParCount=3 Par0=1,Shading,0 Par1=1,DeltaGain,5 Par2=1,Smooth,0 [SetView-View1] ViewTyp=0 LineOp=1 Channel=1 Frame=0 ZRange=-80,305 ViewSize=256 ViewMode=0 GraphMode=1 AspectRatio=0 AutoZRange=1 ParCount=1 Par0=0,ReverseLine,1 [SetView-View2] ViewTyp=1 LineOp=2 Channel=0 Frame=0 ZRange=-45,44 ViewSize=256 ViewMode=0 GraphMode=1 AspectRatio=0 AutoZRange=1 ParCount=3 Par0=1,Shading,0 Par1=1,DeltaGain,5 Par2=1,Smooth,0 [SetView-View3] ViewTyp=0 LineOp=1 Channel=0 Frame=0 ZRange=-120,109 ViewSize=256 ViewMode=0 GraphMode=1 AspectRatio=0 AutoZRange=1 ParCount=1 Par0=0,ReverseLine,1 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k g f p r j k d _ ` h t i f ` ] \ [ Z Y Y Z X [ \ [ \ ^ Y T R P R W [ c a h f b a Y P L I F L T Z a d e a [ V U U Q Q Q R R T W U T Z d b ^ a h h c f ^ [ V Q P T W \ e i c ` [ ] W P T T Z ] [ Y ^ \ ] Z X [ [ ` ^ ] Z Y X ^ ^ _ [ [ Y X \ W U S X ^ m e e c b i j i t q j g j t k g j g c ` ] Z ] ] ` ` \ ` o j b ` a ` ] ` e ` c d a h d c a ] X X T S T S [ e k m n p d V I C @ F R Y f z ~ x m c U K G Q Q X b g k j f a ] Z Y \ _ d b o n e f b [ Y X W W [ Z a j o k h ] S M L N Q V _ o r j b ] _ S [ f f f h f b ` k i a ^ ` o c d n m f ` ] ] Z S Q V Z z w f b ^ X R P Q Z b [ ` \ Z [ \ ` a a b a ^ Z X U R R ] Y V W Y \ _ a \ V S Y \ Z ] [ X Y \ ] ] [ \ b e f c ^ W V P V W U r p f _ Y T R S V _ ] _ d e d d ` ^ Y V S V S V ` e _ [ \ [ Y Y c e d f e b ] \ ^ _ ` a y v l _ [ b g a ] ] ^ ` ` ^ \ \ z u \ T R U W X X W V X [ U T V \ ^ \ ` c c b ] Y X X X U S P Q S R R X X ] ] ] ] Z X W S R Q R T T X [ ] \ ] ^ ^ [ [ X T S f c a ` Y X W Z W \ T P R X \ V X Y ^ c d a \ Y V R O L P P T W ^ c e k f b ] W R Q T V X W _ l h d c _ ] Y W U U T P Q V w z j c _ \ X R P O N P M N P V c f c h i i i [ S N K M O O S V a c [ W Y Y Y Y S R R P Q Z c e ` Y Y W T O O h w e ] [ c { f ` ] T N N U V W [ ` e a \ U V T T W W S R V U U T W [ \ ^ ] [ _ a r s j c ] X Y ` e b _ [ _ Z R S V X [ ^ \ Z X W Y Z n | d Z U U T T V U U U S Q Q Q Q [ a \ e ^ Z _ W S R Q R Q S X W [ Y T W W X a [ X X V T R Y c ^ Y W T U Y T V s t d _ X n n Y U S T T T V [ [ Y _ s h g ^ W Y Y Z d h a Z W S T Y X ^ ` ` a s | q a X U W W X ^ ] \ \ Y W X X X W U S Q P P V a g f ^ Y V U R M H J K N T U _ m c \ V \ Y ^ \ X T M K H J M U Z \ \ f g Z R O I N X U S T V Y ] b Z X X R \ Y Q Q i u i b Z V Q P K K R S O R T U ] o } t d W T W b k f ` ^ W T a \ Y ^ \ X g v h Y X X [ \ Z ] Z V T S T T W W X R Q M L O O T Z Y W V Q M K J K N R S V U h p h X P R S R T P R S S S R Q S U R P R S S S O Q [ j j _ X T R P R N M L K ] d ` _ a  j \ R M N M Q O L O N N R X Z ^ g x  k Z Y T ] l g Z T P N Z \ S d j _ \ Y O N N O Q U Y b b ^ X S S K D B E G Q T S V W ] \ V R N I B @ A F K N P U Y k z q \ Q S M F D B I K J N P [ X T T V T N O N J H N e m k ` X Y U Q O N I G P Q R X T U Y Z _ _ X R L J I G F J I L O S T U \ q x w ` O H I N Q U V [ h c _ a U W d ` U N N S W [ ^ a ` \ U Q H B D C D J T [ ` c a \ X R M E ? > > A D J S U a b e f i w g Q D = < > C I S [ ] a _ c Y N H D F H I Q S U X l n o j [ V Q K I H A B D I U j j e _ b \ Q K J K S M N O Q S V V W V Y _ d u o b q  t b S P V Z \ Z d x ] Q \ i i Z T T W X S P R T R S X U T S S Q N O P L K P M N O P T R O M I H J O P L I L N P S O N N M M M J F E J M L J Z ] ` a \ ` Z P L I F K N N \ b T P N Q U [ Y V S ] S Y \ S N Q U \ \ Z X a \ R K F F K J K I H L L O T b  ^ P I E E J c f _ Y W R P P T ` Z T S T O N O N O L M O P Q S K J M N N L M M K J I F E E J P R T Q P P T T U Q K J L K J L S X X U X U Z ] U T Q J F D C G J Q S f l c X Y W Y [ R P [ W X a R M P V Z ^ ` ^ l c S G ? ? B D H M R X Y Z [ d a K A A C H r t i h ] Z V R P S Q Q N O S R P P Q T S S U Q M N N M L K N O R U P R W U R Q N M K M R W U Y Z W T R [ _ W L F G J M M Q R S V V U U R X U ^ j ^ S P T T T U W h g Z V O K H O Q K M O S \ \ W X T T T S S L K K M S Z } m \ P J F D k s o _ U Q Q R U T S Q Q R T R N L J J J J I I J J I I K O O P T O N R L E A D E F P Y b \ V U O I F E G L K I K J K M R P P P O O L L G F M ` V R O Z Z V [ W O G C ? B E F P U Q U T R Q U P I D G G M T P L N T Q P ] } { _ U P I F D D a i i w ] S S N L L M L I J J H E E E G H O U Q I F B B C D D G O Q M I F C @ A A > ? B E G L R P I E D @ @ > B E F H K I L K L J D I K I F B ? @ C E E L L T U Y S H C Q j w x e U K F D G Q U M H J G F S P I O O O K H U S X S Q H D A C T q X v e K E Q W U S R Q P M K H E C B B B L W U N I G L J H D A C ? = < @ D H M L K I G A > < C A @ A D H O L M O G G H D C D H I @ > H J M L K P O O I E C @ H \ ] V R o | X F A B G T M L H D E Q P L P U O G B B A Q T L G H J K R h U f ` L E N R M Q M I D D B @ A B B E I Q Z V H A > @ ? @ > @ C C C E F G J F H E ? < ; ; < G C @ C F J J E A F = : ; < ; ? D J Q L H O M G I F C D B E G E J b e X V n f J B @ A D B D E A @ J M H J T R O L I F U ] L P r | f T f e R N U o W Q Q P L G P O G A A B F H G H I I E @ > @ B ? = ? A B B B C E C B A ? = @ ? ? A B G E @ ? ? ? ? @ @ > ? ? > = = > A C F N V U Q j m g k ^ S K E C D C G _ ^ R R e f M D B @ > > > = @ ? E O K D C G B D C C D D B U d W \ S J E D G S o | f V Q V N G C > D E > = A E F D D D C B E @ > = > ; 8 : ? A D E J M J G ? ; ; 9 : < D D D C ? A B A A = : 9 9 7 8 9 = @ > @ ? C S U P i t l k c ` e Y Q G A F J J G K ] {  ] J @ D C Z a R E E I H P H @ < A E @ ? D D G D E g T V P E ? @ J T Q P Q K K O L D C B C D C B A ? > = ? > > C @ > A @ @ < > B B B D C > < > D @ @ C D C E N K D ? : ; ; < < 9 < = > ? ? A @ @ = : ; < B R T ^ s g l n ~ g Q H A C A @ F M v k N A < 9 > X j a M K N S U P G B A H B @ B ? C A ? g } Z U ^ ^ K @ > B @ @ @ A F K T Z R K K F @ = ? > = < < @ C G E C B @ A @ = : : 9 < G F C A @ I F A = 8 7 : F J @ B < 8 6 ; ? @ A ? > > B @ > : ; @ F E I Y _ W L D O s ~ e O C F D @ A @ G W Q A = : ; : = P j X H C M Q S M H F B > ? E A > @ @ = = A A ? @ N S I E C G E E G I G G I N H E D D J G D A @ ? ? = < = > @ = = > = ? > < < H N H B ; < = < ? ? > > > D E > < < ; ; > C B E D E E E C @ > = ? E I H \ g _ Q G M q j R I H C ? C C G H D ? : ; ? ? G I L F F @ ? L X R H K H G F J D A ? = ? ? C H H I I F C A ? I B = = @ D F I H G J J J K E ? = 9 9 : : < > @ A A A D D C B > < H P R I A ? ? A A C C ? = ; ? < = < : = = < ? A e ~ e O D A @ A F F G W Y P H A B X n Q K H B @ @ L K E @ = > A B @ N R M D B @ G l  x e V Q K E G C = 7 4 ; > E M q p X H = ; I A = ; ; @ D K M M L M J F D C C C E I S w z h Q H F C C A ? = F U X L E A > = : 9 8 8 8 = J J K E ? = ; < < F _ P E @ A I Q L K V V L G I ^ { w ` U O I E D B M O I F C C D C E Q \ ` [ L E H g } | f V M J N Y \ O D ? F G @ N x | b M D E V Q L J I D C B @ E K S Q L K H I I F F R ~ o Q J F C C C A C I G E A < : < @ C E B C C L R T P F @ ; 9 7 ? v _ R I B ? B J C ; F P E A E b v x ~ t k ^ Q F D C A B N U R _ Y O L L L U Z b _ N G F `   m \ M K G S ] O F A D F B X n T H I \ V M J J J K I E D C N K ? ? ? > D D J N v x V G A > B C A E I N L F ? < : 9 < > ? X e \ U X P I D A @ < : [ v N G G B B A E A < < G F > < S m e a n o ` O C > @ C F M M Q ` b U L P O R P S N C ? > L g j Z O E E L K M D A @ E C = Q  f U K E M E B A D C E K [ S J S U L F F C G D ? ; a ~ \ P M G B C @ @ B H F ? = = < < < > J q ` P A 9 G T N G M { Z F < < ; > > = > A @ K N H E G L N V ` ^ R D < < A K P X \ X c f R L N M Q O K L F A > B D F A @ F H U N C = ; : C G E S ~ g T H C I E E G L Q P Q e e V J D A > @ D K M J I O q { g O J H E E A A C C D @ @ E E C B @ B C s \ I E B M ^ \ M G G N Z V M G C D D @ B G I U ^ [ X M B > C E G A A E G H K R \ ] O D F E C F Q \ U L Q P J O L H K G B B > ; = ? F H M X X T X w y S G L T L K K P N M Z j j c X R O J F C @ @ ? < = > I Y S K G F > 8 3 2 6 < @ B E H G F B ? ? > i s S P [ V T e ^ H B A K R Q K H Q ] [ D , . 4 3 6 F R [ b ] O C 7 + ) , 8 A M ] a \ P I _ g X F B F E G D I Q ` X O K P P V S L G B < 6 D X f g ] { _ N O ] P J L J L I T Y a g ^ V N G A ; 7 7 : 9 > A E K P S N N G A < ; : 9 8 9 = ? D F J I I H ^ g S C ? > C O U Q R N U ` d \ P C < > @ = = ? F M P P J J H B A D = 9 9 ; ; = D M U Z R f v r [ P M F G F M J V [ W R N H D @ C B E > G h a P H Q X Q M M L O P _ g ] Q K H F D B @ C C D E A @ B F K N I E B ? ; 9 < B @ @ E D C C F E C B A I G E K H C E F S O K K R k k i e X J I K I H D A @ L U V N H G C A A B = : ; ? C F K L O M Z s q W K L H J N I E D G D F D @ H J P T U N Q k ~ \ N F F J Z W V V S P O L P M E D B E F H K P R N M F E F G N S P I F C A B C L P L K E B ? = = ; < ? B E G T R M I G H F A A H i q k b V O J F D @ D @ ? G Q O G D G F D F N L G C C I M F D K Q R g g V N J I D @ @ B A A A G H E H M N T U P P c g P J C S ` S T ` Z R N M P T N J E C C C F I N K K I L M O G I E C F F @ D M O S N P L E A ; 9 ; = @ A E E E G G C B K M G A G f w  u b R K G E A E D F C G C A ? ? E F F E C B @ A J Z S H L I H H H H I Q P M O K E D C B E C @ C E F J Q O S b h L C E X Y P [ q r e V [ ^ Y M E C F F H H J P R O M M I K G D C @ G N H F M L R V N K K I B = ; < < B F G E K O J B ? B > ? D \ v v Z K I H F F C C @ = < = < = B C D G H G E J W f c O C B D J M K M T W S Q J F B = ; = D E E F H H U U U d x ` K F G Z o ` c p Y Q [ U I E E M K J L K K L R S T O J A = < < C J G L M L O T J D D L J @ < = A H G L N I H J C > : 8 9 < W r  _ S L I F A ? D > > ? ? C G H H G I K H F L S g g P D D F N T U W _ \ P P N K B > : ; K j o _ W Q K F J ] h v x \ M I H U b Y r y c U Q ` W K E C Q S T N K K L J I G D C A @ ? A B D E D D I ` s i W P S O I D D F D C E I I N K H H G F D A L b | p Q H K N S P J F A > A C A A A E F D @ = A O \ g ^ T P I C F E D I S R N Q U Y S J D = Q q y r ^ S O I K ` s p p v q c Y L C A A p ` V S P L G I K I J H K J O S M M O N J H F C D K I H K J L L M L [ p o ^ N J F C B B D G J N Q M M H J D ? ? = B C P j x b U L F C C F D A @ B D K L I K M P P S L H E M G G G I L N P Z [ U a _ P S [ S K D C E V } \ O F C A M ` n l k ` Z a X T P M  z ` Q K F E L M M O R T T Z S N I C @ B D E H S U S M K H E E E O l t ^ N I I N M G A A D C D D G F H D A E E H H H N J C B @ = A G J L H F J L L G C E H M K M K D C G F H I N Z W T M G B E J F O ` a ` t w j Z v e R F ? < > E ^ s x l Z W Z I E A C v k ^ W R Q k u \ T N O Q P N O K H H I I O V V \ W O H D D H Y Z P J J I I J F D E F D D D H J L J J O N L H H E H F H P O L G G M J G C C G I K H E L M O X O K N P N I G K H J F J L S ^ X V i j u q X N G D D F H L L Q d o ] O F E G I I J f y n g ] ] t d Q M Q V _ b a _ X P G ; 5 2 = q n a [ R G B < 6 8 = I L L K P U a c X O H E A ? 4 3 5 ? L W _ a _ Y N I B > P W N H I K M O N L J G J K K M F A A E M P O T X _ V P Q P b e U P Q L M H K J J I G G N K F M L K I T ] a U S T V V ]  y c Z P J H I J N S W V S Q S x l [ X R S Q M H D P O E = ; > J O M S b g i _ S L A 8 9 > ? ? @ G N X ] ] p v d N > 6 4 : B F L Q X [ W [ Q I F @ ; < > B B G H N ` f r } W E @ @ ? F N P U U W U S \ S F C C H D \ g e \ T O P S U x m Y X Y S O O L J L P M G M W   v a V L G F H H S W M H H L S \ X ` u u q d T K H J K S T M I G D B A > P h Z R W Q L N S Q N N L I G D E C C F J R W U P R O L T T U j } f S O P S U R P K J D C C @ E J I I L P Q T b e \ S U V U R \ } j X O M K J K J J K O R W ` Y g ,4/ n X L H F C D C E F E H E I Y [ p \ L H L H E K J K J F C D D B @ @ O T N K I H N M I F C F I J I F E E H K J K G M N N L H E B A C F G E G G K N S Q M Q K F F A ? A B B S N M H I K Q O U X h f ^ Z T N I E @ B F K U R V d f z >LH3 v Y O H G F J L M J G H G @ D P i t Z V V M E E D D C B @ C E F K F R S H E @ ; : = B F H L P V S M G A @ B C H L M Q U Q K J J I H H I L R M H F E F G J L L M L I H F B Z X T R U V ` Y S Q _ d Z N J I L L L M O O N P N ] ^ u >KD. q R H I Q N I J M N S Y R L H G \ r Y N S R I G E D C E E F F E B D I H H K I G E D F F F F E D F F D I G P S P S Q S \ V Q N J G F H E H P O L K N L I J L M N L J I I H ` c ^ \ \ Z U Q K J X f _ V P P P P P P O L I I F C L g ;OH3 h S I G U Y P L Q S V U U P M G K s l V R Q M M G A ? ? A @ C H M K J G I I N H C @ A B A B C D J M J N V R P M G M L H Q O M L J M P R P P Y V L I P M L L K N N M M N Q P T ] V Z \ Y T P Q R R M M K K O J G G N S S T T P J G X *7) z e Y R L T X P Q M E C A G L K M K U f t ~ t R C ? = @ B B E J N M H I F F E A C D F Q S N G F G F G J P e l [ P Z W N M O W ] Y P H D C B L M H N N M K I K M M L K H H E C G I L R \ a d c ] V O K M M N O R R U [ Z U Q R X R L J E G E Q { "" q ` O J G I O P X \ Z U P Q M H F B B E E G F G H I I J G F F L K K F D H K N L J H H J O N J J L K J H e y b Y T P P S [ Z S L H H I S R N P T Q M O O Y R Q L I G H H H M S V T Y c e ` Z V T V S O N O M I O T Q P W ] ^ Z W P H C B G t v e T H F C B C J P K K L R T [ Y P I F D A > ? @ D G M T R R W W W M H E @ F J G D F G P [ V N K J G F [ d T L N P T ^ ^ W O G B B P W Q Q U U R R P Y Y R K H H N L I R Y \ ^ ` b c _ X T P N O P P S O G F H E E H J O R W X V P K G ` o e Z R P T S M M F A A B C L R Y W Q J D A @ < < = @ D P ] ] R P P N I G A < : : ; < ? D K O O L J J H C S \ P J I H J P P Q M J F E N S K J I I G H J S U L D C E I H G M T W T Y ^ ` ] Z X U M H E G E D F M O R U T T Q M J J L G D D U r ~ r g ^ T M K H C > = ? ? @ I L S W W T M L C < 9 8 > D I W k s o _ T R F D C C C C ? > ? C I M T S O O M G A @ m r Z O O M K M L H L G A = < = > O [ W Q O M Q M H E A A E N L J L W X S Q R X X W V T R T T O O J J K K L J J M O M L K Q Q K I K R T V S R R P U Q K J G J I N K G D J J M T N J J H F F B F I C J X d o p d T L I H E F E F J G C B E E H H I L K I J J N Y U L H N O O G H K J R P J H G O g ~ i U N Q N L M ^ l k ^ Y P K N S b _ W S Q N K N O N M O S T T R R W U L H E F H J U R P T T R P J I H I J J G F I J P S T S O J J H H G C F H E J J I M M N Q c t s ] S N L N P R O O M I E A A D G I I H I H I L S T N J I F A A @ @ D J O ^ r q g  ^ L J I J N p  ~ q _ V N P V [ Z X Z V S P R Q N M N W Z V T U ` _ \ V X Q K I H G I L M L Q P P N K J Q Q N J J N R X [ T N J J K M L O Q Q O K I G C E K b | s a W I G K K I J P M H C D F N P P N Q R T O U X Q M K L J P S Q L I O [ t | u ~ n W L I O N h o Y P M L N \ V T P N L L M Q S U ]  d T R T O I S V U V U S Q Q P L K I I H X [ V P L N Q P P W P N P G B A F G G K P Q P N K G D G ] z } l d Z Q O T M G H G E E F F P Q R M N N L K N T O J H I K L N S Q L I O m ~ y t f V M H I G [ { u X O L N P P a ` ^ Y Y V N J H I M ^ u ^ W R P V Y O P I G H H L O T T Q P a h ^ O G G E D E N i | i \ X R J F H H E D C L N U r e U R N Q Z X T P O J I H F F G K N Q R P Q O O X T N M P L G H J G G H e z d v X I D F I J N R T U V Z S O N ^ Z X U W U T S R S Q Y b X O M N Q P X S Q Q Q U W U U Q P \ l ` V O R V Y a o z f \ U R N O O Q N M R P U e ~ r ^ U Q M N P O L O L J K I I K L K N S W T U Q X T O L I L P O Q Q N M O Y V S S f g Y Y U R S S P O L J J M Q N T U ` ^ [ X S R P P S V S U d [ V P O R P P O S U U T R T S Q S j ~ m ] V R T ] f | p [ T S R P P T P N X _ f x | k \ R R R P N K J L N R Q P O N M K L O R V U V X R P P N R N L P N P S X Y X U R M W S U S O R P Q M N P T U T Y a X P P S T X [ \ ` ] Y U h i W R R S U ] [ W T V U U P M P P S T k k ^ [ [ ` e { k X [ Y U Q P X [ e | ~ | v g Y U R P L I J K I K P T T R O N M L M O N T T Q Q Q P N L U \ [ Y Y ^ ] Y U Q Q ^ ` ] \ U W Y T U U Q Q Q N R Z _ ` ^ ^ ^ _ ` ^ ] [ W U Q X e \ _ \ Z ^ [ X X S O N O T U T T Y X T R b l o ~ o o r p i ^ U T Y _ Z U Z y w i ] V N M K K J J I M Q M M P R U O L M T S Y X S P O P L M R W Z W T W W V S S T _ ^ W [ U S U T [ ^ V P M N R Y _ Y X W X ^ ` ^ ] _ Y Q L I J P V Y [ _ ` ^ Y W S O P T [ T Q R T T R Y | o l h i a Y U U N N N K ^  p Y Q M K K M Q R T V Q M J H I F F H J O X ` ` X R O J F H D C F K K L N Q S W X b b U S O N S P N O S Q N M R T ] ] ^ _ ^ \ X U R O P P R T X Y Z X Y V U T O O Q T T Z \ [ Y V R P L K ` o \ f  s t l _ V R M N G H Y -LbeV: i Q J M M K L T S V S Q R O R J U Z R O M O T R P N K J J K M M N R \ T P O O R Y ^ \ X R P S S S Q Z X V U W W Z [ ] Z \ \ [ W T T U V V V T P N M S T T ] \ [ [ Z Y U U U V U U T U S U N R b ~ } s ] P N K M P [ r  FgtW3 p [ ^ ` U R M Q P J F G L O R P ` n g _ Z T V S J J H F I L O S V ` p l ] R N L O J T U U Y _ a [ X X W S P L J T Q T Q Q Q W ] ` c b _ Z S M N K G J M V _ ^ b b a d ] Y S O M R Q N N L T Z k q f ^ R M Z ] ` d ~ (Ad|eC x d ` _ L = 4 = I O Y ` _ V L B E Z W U X [ Y O 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