[DataSet] Version=2 GroupCount=2 Gr0-Name=Scan forward Gr0-ID=0 Gr0-Count=21 Gr1-Name=Scan backward Gr1-ID=0 Gr1-Count=21 Gr0-Ch0=DataSet-0:0 Gr0-Ch1=DataSet-0:1 Gr1-Ch0=DataSet-1:0 Gr1-Ch1=DataSet-1:1 SetInfos=DataSet-Info InfoSetCount=3 InfoSet0=DataSetInfos InfoSet1=Calibration InfoSet2=Parameters [DataSet-Info] -- Scan --=-------- Image size=50m Scan direction=Down Time/Line=0,5 s Points=128 Lines=128 X-Slope=-1,32 Y-Slope=3,74 Rotation=0 X-Pos=0 m Y-Pos=0 m Z-Plane=0 m Overscan=5 % Const. Height-Mode=Disabled Date=22-03-2017 Time=12:49:03 -- Feedback --=-------- Setpoint=20nN P-Gain=10000 I-Gain=1000 D-Gain=0 Tip voltage=0nV Feedback mode=Free Feedback algo.=Adaptive PID Error range=20 V -- Global --=-------- Measurement environment=Air Op. mode=Static Force Cantilever type=CONTR Head type=EZ2-AFM Scan head=10-12-648.hed Laser working point=0.0% Deflection offset=0.0% Software ver.=3.1.0.22 Firmware ver.=3.1.3.13 Controller S/N=023-12-121 -- Module --=-------- Controller Board=2 AFM Basic Module=3 AFM Dynamic Module=0 AFM Extension Module=0 Video Module=0 Signal Module S=0 Signal Module A=0 USB Module=5 Nanosurf Report=6 Scripting Interface=0 Spectroscopy Module=0 Lithography Module=0 [DataSet\DataSetInfos] SubSectionCount=4 SubSection0=Scan SubSection1=Feedback SubSection2=Global SubSection3=Module [DataSet\DataSetInfos\Scan] SubSectionCount=0 Image size=50m Scan direction=Down Time/Line=0,5 s Points=128 Lines=128 X-Slope=-1,32 Y-Slope=3,74 Rotation=0 X-Pos=0 m Y-Pos=0 m Z-Plane=0 m Overscan=5 % Const. Height-Mode=Disabled Date=22-03-2017 Time=12:49:03 [DataSet\DataSetInfos\Feedback] SubSectionCount=0 Setpoint=20nN P-Gain=10000 I-Gain=1000 D-Gain=0 Tip voltage=0nV Feedback mode=Free Feedback algo.=Adaptive PID Error range=20 V [DataSet\DataSetInfos\Global] SubSectionCount=0 Measurement environment=Air Op. mode=Static Force Cantilever type=CONTR Head type=EZ2-AFM Scan head=10-12-648.hed Laser working point=0.0% Deflection offset=0.0% Software ver.=3.1.0.22 Firmware ver.=3.1.3.13 Controller S/N=023-12-121 [DataSet\DataSetInfos\Module] SubSectionCount=0 Controller Board=2 AFM Basic Module=3 AFM Dynamic Module=0 AFM Extension Module=0 Video Module=0 Signal Module S=0 Signal Module A=0 USB Module=5 Nanosurf Report=6 Scripting Interface=0 Spectroscopy Module=0 Lithography Module=0 [DataSet\Calibration] SubSectionCount=2 SubSection0=Scanhead SubSection1=Cantilever [DataSet\Calibration\Scanhead] SubSectionCount=0 Version=5 HeadTyp=EZ2-AFM SerialNo=uncal 70u RevisionNo=2 ScanFit=Pomfit CtrlInPol=Positiv ZAxisPol=Negativ Ch0Corr=None SetPointCheck=None OutCount=7 Out0=8,DriveAmp,Excitation amplitude,V,5.3,0 Out1=7,AnalogOut3,User Output 2,V,10,0 Out2=6,AnalogOut2,User Output 1,V,10,0 Out3=4,AnalogOut0,Tip voltage,V,10,0 Out4=2,ScanAxis2,Z-Axis,m,7.9e-006,0 Out5=1,ScanAxis1,Y-Axis,m,3.9085e-005,0 Out6=0,ScanAxis0,X-Axis,m,3.703e-005,0 InCount=19 In0=10,User Input1,User input 2,V,10,0 In1=9,User Input0,User input 1,V,10,0 In2=11,HeadSig2,Not defined 1,V,10,0 In3=8,Lever Current,Tip current,A,0.0001,0 In4=7,TipPhase,Phase,,90,0 In5=6,TipSignalAC,Amplitude,V,10,0 In6=5,TipSignalDC,Deflection,m,8.62e-006,0 In7=13,Channel6,User input 2,V,10,0 In8=12,Channel5,User input 1,V,10,0 In9=4,Channel4,Tip current,A,0.0001,0 In10=3,Channel3,Not defined 1,V,10,0 In11=2,Channel2,Amplitude,V,5,0 In12=1,Channel1,Topography,m,7.9e-006,0 In13=0,Channel0,Deflection,V,10,0 In14=19,SensorSignal2,SensorSignal,A,0.0005,0 In15=18,SensorSignal1,SensorSignal,W,0.005,0 In16=17,TipSignalDC2,Deflection,N,1,0 In17=16,TipSignalDC1,Deflection,V,10,0 In18=20,Channel7,Z-Axis,m,7.9e-006,0 ScanCorrCount=1 ScanCorrA=-1.824e-006 ScanCorrB=0 ScanCorrC=0 ScanCorrD=0 ScanCorrE=-3.286e-006 ScanCorrF=1.736e-006 ScanCorrG=-7.543e-009 ScanCorrH=-8.617e-009 ScanCorrI=7.083e-009 ScanCorrJ=5.556e-009 ScanCorrK=2.484e-011 ScanCorrL=3.37e-011 ScanCorrM=-3.489e-012 ScanCorrN=-1.103e-011 ScanCorrO=-3.146e-012 ScanCorrTableRot=0 ScanCorrRotX=0.0907572 ScanCorrRotY=-0.026878 ScanScaleZ=4681.1 ScanScaleXY=256 ZRangeFit=None ZRangeCorrCount=1 ZRangeCorrA=1 ZRangeCorrB=0 ZRangeCorrC=0 ZRangeCorrD=0 ApproachStartPos=0 MaxApproachSpeed=1 ManualMoveSpeed=1 DefaultDynRefAmp=0.25 DefaultDynRefAmpLiquid=0.2 DefaultForceModRefAmp=1 DetectorABGainAC=0.5 CompDcWithZ=0 VideoSupport=1 SensorStatusMode=1 SensorStatusPol=Negativ SensorStatusMeterRange=0.0866142;0.102362;0.102362;0.811024;0.811024;0.913386 LaserWavelength=0 [DataSet\Calibration\Cantilever] SubSectionCount=0 Version=2 GUID={89E92173-96FB-4ff9-94D8-42296D00D980} Name=CONTR Manufacturer=Nanosensors PropCount=7 Prop0=D[0.2]*[N/m] Prop1=D[13000]*[Hz] Prop2=D[0.00045]*[m] Prop3=D[5e-005]*[m] Prop4=D[50]*[] Prop5=D[4000]*[Hz] Prop6=D[5]*[] [DataSet\Parameters] SubSectionCount=7 SubSection0=Approach SubSection1=ZFeedback SubSection2=Lithography SubSection3=Imaging SubSection4=SignalIO SubSection5=Spectroscopy SubSection6=SPMSystem [DataSet\Parameters\Approach] SubSectionCount=0 ApproachSteps=L[65000]*[] WithdrawSteps=L[1000]*[] AutoPeriode=D[0.02]*[s] MovePeriode=D[0.02]*[s] StepSlope=L[6]*[] AutoStartScan=B[0]*[] AutoReloadParameter=B[0]*[] AutoReloadWorkspace=B[0]*[] ApproachSpeed=D[0.0801099]*[] ManualSpeed=D[1]*[] ApproachThreshold=D[0.01]*[] AFMApproachMode=L[0]*[] AFMStepByStepSpeed=D[1]*[] AFMStepByStepSlope=D[5e-006]*[m/s] [DataSet\Parameters\ZFeedback] SubSectionCount=0 PGain=L[10000]*[] IGain=L[1000]*[] DGain=L[0]*[] SetPoint=D[1.99933e-008]*[N] SetPointForce=D[1.99933e-008]*[N] SetPointDC=D[1e-009]*[m] SetPointAmp=D[50]*[%] SetPointPhase=D[1]*[] SetPointAProbe=D[25]*[%] SetPointForceUnitMode=L[2]*[] SetPointForce_V=D[0.273]*[] SetPointForce_m=D[0.0001]*[] SetPointForce_N=D[1.99933e-008]*[] ChGainRegError=L[0]*[] PosErrorMult=L[1]*[] FeedbackMode=L[0]*[] Algorithm=L[1]*[] RefFrq=D[179239]*[Hz] RefAmplitude=D[0.530049]*[V] RefPhase=D[112.088]*[] CoarseSweepStartFrq=D[9100]*[] CoarseSweepEndFrq=D[16900]*[] CoarseSweepStepFrq=D[100.002]*[] FineSweepStartFrq=D[130000]*[] FineSweepEndFrq=D[210000]*[] FineSweepStepFrq=D[100]*[] ManualSweepStartFrq=D[130000]*[] ManualSweepEndFrq=D[210000]*[] ManualSweepStepFrq=D[100]*[] AutoCalFrqPeak=B[1]*[] AutoCalPhase=B[1]*[] DynamicAmp=D[0.200049]*[V] CalRefPlotGraph=B[0]*[] ForceModFrq=D[20000]*[Hz] ForceModAmp=D[4]*[V] AutoFrqSweepRange=B[1]*[] AmpCtrlMode=L[0]*[] AmpCtrlPGain=L[150000]*[] AmpCtrlIGain=L[150000]*[] PLLBandwith=L[2]*[] PLLLockrange=L[2]*[] FrqPeakReduceAir=D[20]*[%] FrqPeakUpperSideAir=B[1]*[] FrqPeakReduceLiquid=D[5]*[%] FrqPeakUpperSideLiquid=B[0]*[] RegMoveMode=L[0]*[] [DataSet\Parameters\Lithography] SubSectionCount=0 ModuleLevel=L[0]*[] OpMode=L[2]*[] InactivePenMode=L[0]*[] AutoChartSettings=B[1]*[] AutoCapture=B[1]*[] [DataSet\Parameters\Imaging] SubSectionCount=0 ModuleLevel=L[1]*[] ScanRange=V[4.95237e-005,5.00002e-005,0]*[m,m,m] ScanOffset=V[0,0,0]*[m,m,m] ScanRotation=V[3.73535,-1.32407,0]*[,,] ScanTime=V[0.499491,0.499491,0]*[s,s,s] Datapoints=V[128,128,0]*[,,] MeasureMask=L[3]*[] ScanMode=L[0]*[] OverScanSize=D[5]*[%] FirstScanlineRep=L[1]*[] SyncOutMode=L[0]*[] LineMode=L[0]*[] RelTipPos=D[-3.27949e-007]*[m] AutoSlopeCorrection=B[0]*[] AutoDeleteBuffer=B[1]*[] AutoChartSettings=B[1]*[] AutoCapture=B[1]*[] [DataSet\Parameters\SignalIO] SubSectionCount=0 UserDAC0=D[0]*[V] UserDAC1=D[0]*[V] EnableUserADC0=B[0]*[] EnableUserADC1=B[0]*[] TipSignalMode=L[0]*[] ExcitationMode=L[0]*[] User0CtrlMode=L[0]*[] User0InputPol=L[0]*[] User0OutputFlag=L[0]*[] User0SetPoint=D[0]*[V] User0IGain=L[1000]*[] [DataSet\Parameters\Spectroscopy] SubSectionCount=0 ModuleLevel=L[0]*[] SpecPoints=L[1]*[] OutputType=L[0]*[] Averages=L[1]*[] FwModTime=D[1]*[s] BwModTime=D[1]*[s] ModRelValue=B[1]*[] FwModDatapoints=L[1024]*[] BwModDatapoints=L[1024]*[] SyncOutMode=L[0]*[] FeedbackActive=B[0]*[] AutoChartSettings=B[1]*[] AutoCapture=B[1]*[] StartOffset=D[-5.72715e-007]*[m] SpecEndMode=L[1]*[] FwModRange=D[9.45455e-007]*[m] BwModRange=D[-9.45455e-007]*[m] FwMoveSpeed=D[9.45455e-007]*[m/s] BwMoveSpeed=D[9.45455e-007]*[m/s] FwSamplingRate=D[1024]*[Hz] BwSamplingRate=D[1024]*[Hz] FwModMode=L[0]*[] BwModMode=L[0]*[] FwModStopValue=D[0]*[V] BwModStopValue=D[0]*[V] FwModStopMode=L[1]*[] BwModStopMode=L[1]*[] FwPauseTime=D[0]*[s] BwPauseTime=D[0]*[s] FwPauseDatapoints=L[0]*[] BwPauseDatapoints=L[0]*[] FwPauseMode=L[0]*[] BwPauseMode=L[0]*[] AutoRecalibrateProbe=B[0]*[] [DataSet\Parameters\SPMSystem] SubSectionCount=0 AOut0=D[0]*[V] AOut1=D[0]*[] VideoSource=L[0]*[] SPMMode=L[2]*[] VideoTopLight=D[100]*[%] VideoSideLight=D[100]*[%] VideoTopBrightness=D[80]*[] VideoSideBrightness=D[80]*[] VideoTopContrast=D[70]*[] VideoSideContrast=D[70]*[] FlexVideoTopExpTime=L[60]*[] FlexVideoSideExpTime=L[60]*[] FlexVideoTopGain=L[8]*[] FlexVideoSideGain=L[8]*[] FlexVideoTopADCLevel=L[2]*[] FlexVideoSideADCLevel=L[2]*[] FlexVideoTopRatioR=D[1]*[] FlexVideoSideRatioR=D[1]*[] FlexVideoTopRatioG=D[1]*[] FlexVideoSideRatioG=D[1]*[] FlexVideoTopRatioB=D[1]*[] FlexVideoSideRatioB=D[1]*[] FlexVideoTopRatioGamma=D[1]*[] FlexVideoSideRatioGamma=D[1]*[] FlexVideoTopAutoLevels=B[1]*[] FlexVideoSideAutoLevels=B[1]*[] HighResVideoTopExpTime=L[60]*[] HighResVideoSideExpTime=L[60]*[] HighResVideoTopGain=L[25]*[] HighResVideoSideGain=L[8]*[] HighResVideoTopADCLevel=L[2]*[] HighResVideoSideADCLevel=L[2]*[] HighResVideoTopRatioR=D[1]*[] HighResVideoSideRatioR=D[1]*[] HighResVideoTopRatioG=D[0.8]*[] HighResVideoSideRatioG=D[1]*[] HighResVideoTopRatioB=D[0.8]*[] HighResVideoSideRatioB=D[1]*[] HighResVideoTopRatioGamma=D[0.9]*[] HighResVideoSideRatioGamma=D[1]*[] HighResVideoTopAutoLevels=B[1]*[] HighResVideoSideAutoLevels=B[1]*[] ActiveSensorByGUID=S[{89E92173-96FB-4ff9-94D8-42296D00D980}]*[] MeasEnv=L[0]*[] ProbeStatusType=L[3]*[] EnableProbeStatus=B[1]*[] SysStateIdleZMode=L[0]*[] SysStateIdleXYMode=L[0]*[] [DataSet-0:0] Version=2 Points=128 Lines=128 Frame=Scan forward CurLine=0 Dim0Name=X* Dim0Unit=m Dim0Range=4.95237e-005 Dim0Min=0 Dim1Name=Y* Dim1Unit=m Dim1Range=5.00002e-005 Dim1Min=0 Dim2Name=Deflection Dim2Unit=V Dim2Range=20 Dim2Min=-10 SaveMode=Binary SaveBits=16 SaveSign=Signed SaveOrder=Intel [DataSet-0:1] Version=2 Points=128 Lines=128 Frame=Scan forward CurLine=0 Dim0Name=X* Dim0Unit=m Dim0Range=4.95237e-005 Dim0Min=0 Dim1Name=Y* Dim1Unit=m Dim1Range=5.00002e-005 Dim1Min=0 Dim2Name=Topography Dim2Unit=m Dim2Range=1.58e-005 Dim2Min=-7.9e-006 SaveMode=Binary SaveBits=16 SaveSign=Signed SaveOrder=Intel [DataSet-1:0] Version=2 Points=128 Lines=128 Frame=Scan backward CurLine=0 Dim0Name=X* Dim0Unit=m Dim0Range=4.95237e-005 Dim0Min=0 Dim1Name=Y* Dim1Unit=m Dim1Range=5.00002e-005 Dim1Min=0 Dim2Name=Deflection Dim2Unit=V Dim2Range=20 Dim2Min=-10 SaveMode=Binary SaveBits=16 SaveSign=Signed SaveOrder=Intel [DataSet-1:1] Version=2 Points=128 Lines=128 Frame=Scan backward CurLine=0 Dim0Name=X* Dim0Unit=m Dim0Range=4.95237e-005 Dim0Min=0 Dim1Name=Y* Dim1Unit=m Dim1Range=5.00002e-005 Dim1Min=0 Dim2Name=Topography Dim2Unit=m Dim2Range=1.58e-005 Dim2Min=-7.9e-006 SaveMode=Binary SaveBits=16 SaveSign=Signed SaveOrder=Intel [SetView] ViewWidth=666 ViewHeight=528 ViewCount=4 View0=SetView-View0 View1=SetView-View1 View2=SetView-View2 View3=SetView-View3 [SetView-View0] ViewTyp=1 LineOp=2 Channel=1 Frame=0 ZRange=-62,61 ViewSize=256 ViewMode=0 GraphMode=1 AspectRatio=0 AutoZRange=1 ParCount=3 Par0=1,Shading,0 Par1=1,DeltaGain,5 Par2=1,Smooth,0 [SetView-View1] ViewTyp=0 LineOp=1 Channel=1 Frame=0 ZRange=-309,2017 ViewSize=256 ViewMode=0 GraphMode=1 AspectRatio=0 AutoZRange=1 ParCount=1 Par0=0,ReverseLine,1 [SetView-View2] ViewTyp=1 LineOp=2 Channel=0 Frame=0 ZRange=-63,78 ViewSize=256 ViewMode=0 GraphMode=1 AspectRatio=0 AutoZRange=1 ParCount=3 Par0=1,Shading,0 Par1=1,DeltaGain,5 Par2=1,Smooth,0 [SetView-View3] ViewTyp=0 LineOp=1 Channel=0 Frame=0 ZRange=-894,839 ViewSize=256 ViewMode=0 GraphMode=1 AspectRatio=0 AutoZRange=1 ParCount=1 Par0=0,ReverseLine,1 #!uux.huT`x}q;kph]xszv~vk}luyNtztrswxyvvz}yz{w{dxsyrrstjpsquuYpyywtsvwwr~jppu{~zuos{xvvuwy~rWilpizrfBXzarwT+uesXrtps{wxyhvvs}ts|r|^hcp}tvyxvis{tz}xx~yy~vtyVpsstkpxzvt~tfrn}rs}qq}xmwoSear^lxxrzxvu~W]{vw{zbwUu}vow}glip|x{{t`~u^|[xwwryy\jss|yyxxy~wxxzussru`gyahDd~xxs}ymqktypgwtrgoyqzow<Z@cuu`Xyw{tRojuwzur|kiqutpyqs}da^an~}y{qk{yw{upnxss~ippk\q|xtvxptttzdok~xkelalpzryrst~cunxz}wdhldN{~{zxxwspzHIXrzzzutxrrk{r<azzqtuzdkpWqvavz:_jp}n|p[tvsopkrq||zr48q~^u}rtxltSjjqmq{c^wrYioxwswpuwvuzwiozqx~|^iuyswt{o}rqafxvwly~ywncct|xZ{rpwvwtzytrst~t|wes{gW< 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C M A A 7 5 0 - / 7 P ? ~ } y q n k k m s { } | y u j f ` b j { r | u t w e Z W Y U ] a ` d d c b ` Z S P O M M T M Q Q R S W c [ W R J E A < = @ J H I N N h V I A : 7 6 6 1 2 2 4 6 < \ X K ? 3 < }  ~   } { | | { { | y u w u u u o o n z s t z q | } o i h h i g d f e b r p e \ X W X w m ` \ ] [ X T W f \ Q Q S O N K I I G H F H X k [ O G C A B B G r e O F G @ < 8 4 5 4 8 : 4 1 7 7 1 / - 0 - / 2 -  x v w { r |  t l j m m n i h j k g d a _ i m d d d k w i c ` ] X S P O T \ V T T V X p h b h V L B @ B D D I G P J H G E C J T K D > G D = 9 ; > A @ = ; ; 5 1 + ' ) + 0 = 0 * & U y v r s q s y t s q p n o i x k b _ e n h l h g d { o l g _ Y U R O P S ] \ X b j \ ^ y X M M P N O P J G E D C B D E F i U H B @ D A @ ; < A d K = 7 7 5 M J 4 / , , 1 1 . 7 . * ( %   t o } y w  | t o m o h e a d d ` ^ b e n g d b } a X \ g } f X Y W Z ] n ` o T L H Z a T q V L ] H B A @ H P J J I B : 4 6 9 9 ? ? @ > B K 9 2 1 : P Y @ 8 6 - * 0 0 4 0 , + ) % " 0 . #         ~ |  x x v t r ~ y p l o p z o h e e a d a h f a b ^ Z _ x e ] U R P W j a   j Z \ W Q R U } c N H F D F F B B ? : : : : < > < k Y C C ; = 8 7 7 5 1 3 2 1 4 0 0 > 3 2 2 8 / , + + * ! % #         #  ! 5    z y  } { v o k i j | s i f m e | m n g g a [ \ [ Z  w a [ V [ v h d [ X Q O J H M I j r f Y O P Q W W R A : ; 9 ? = A B B B B @ A = Q ? 2 . 8 3 2 7 7 6 Q H ; 5 F = 1 ' $ " ( " ! . @ 0 7 1 ( $  = 7 7 ?        = 3 <  | | } y | v r v p q k n i f d ` g k ~ m f a a d | s d ` Z V e q _ [ Z d X S R Y Y u b \ S Q T S K I J J P N F @ @ @ ? L C = ? = 9 2 2 3 5 6 : 7 6 2 0 1 0 9 : 4 3 G 7 1 Z A 2 - , - + 1 . + ( $ * ' & %   # ! # #                  x d ' y o s k f b a _ ] \ X X U R T W X _ Y W V R T U w f U P O K Q S M H D K W L F D G C H I | ` _ E = < < = ; ? 9 V J < 3 2 0 1 2 k h C 7 / - & / ) ' ' % ( A 3 + ) * 0 ? 1 & !  " + !  4 #   % &   ? F   2    y z { -  ) | k q ` W e ^ [ a ^ a n ` W R R T P M M K N M N J I I Q H H R P L H A = N Y C ? ? ? A A H D > 7 4 b O C B Z [ D 2 - ( ( - . , , + , ' & ( $ L ; . ' $ ! 0 & #   % $ !   (           F +          y w r s p W  u f b c ` ` ^ ] ^ o d ] X S Y W T T Q V Q J v { P C @ A D G C K G C A ; 8 2 6 = ? Q G C ; b o H < @ U A A r U ; 2 / ( ) - 0 0 / , &    "   # # % "        7 !                 /     y q j g d l e f e c h f X O O R M K i n W P X Z ] T O Q \ V P R K E B @ @ B D A > < ; O Q A A : 2 . . + 2 - 6 2 1 3 / 5 , ( ' ( ' ' %  # P ? 0 ? 2 + & " D -           $     - 8   > d "    '    | ~ o j e a ] X V Y V U S T T Q N L W X \ S O R j S O J E C A : > ; : < > l U F @ > 4 3 ; T A 6 3 L F l G 2 + . 4 1 / - * ' #    1 : ) % ! "      F 7        %  # W "    5 i )        i e e ` a w l _ Z U N L M J I H N J K U Z M ^ R L K B @ Q = 6 : O N < 9 = ; T C 7 9 [ ] 9 2 + ) ) 0 - ( > / ' # ) 5 ( & ( #     "  % B $                                d ^ \ [ j Z T e ^ U N ^ k P h p J @ ; ` Q O F @ 8 0 3 7 6 1 : 8 3 0 / ' & & & & + ) % 0 D @ . ) K - &       $ F = * #         !      0      )  ] W T R N L J J Q S N J F E D D ? B E \ [ Y S l O 9 - ) / * * ( ( ( 2 . ( " " # !  #    b U )     . 0       #        3 !    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' % $ # " "        $    v t x ~ w o h j k x x k h l q s t n { r k f o w ~ | r ` R H K W m ] Z ^ Z [ _ ^ P S ^  U t 8 . 5 = N P N V \ r L 1 ) . +    , V t 6 3 #             ~ q p q r v x p k j u k h w y | ] \ ^ [ ` e j X X T U Q C B D H M S W Y c P V H O 8 3 3 9 7 2 0 5 0 0 1 , - + ( % $   $ & /     &     | ~ z u q o m m i i i i i i j f a d g d d k m q e z k Y c w q U Q Q H D F D J Q ? @ = 9 7 9 8 9 G ` d H : 1 , $ ( 6 E 0 ' , ; " #           . U  v { t w z | t u q p h d e g b i y ~ o w p b Y Y ^ m _ U Q N O L O N N U m J B < > 9 5 6 7 4 5 < F ^ 6 , + & $ " # , 9 $   # ( 7    & 3  .  ~ } ~ z s n n q l g i l p } q i m g k q l h b Y T W V Q S T W [ T V [ o R C > = < > I c v L Z I V @ H N 2 5 ( / = 3 A 1 1 ) * ) ' # &          ~  ~ { | v v u s p p m p t r s x u j m m k e d b b h u Z _ u a [ _ l w s r W c w Y > = ? > @ @ > < = ; > C 4 1 * # ! ! 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E    l s t ~ j l p y m a ` ` ] ^ Y Z \ e r Z S P N P T ` P L L I K H L G B E E D G @ : 8 3 4 8 A / . . , * * 2 2 % % - ( % ' % P H d         H l  } e t z  g i s y | {  q Y S ] b i e ^ _ \ \ ` h o W V W P J E B ; : A M l F K P N M I G G F "  % + 1 0 8 @ > 6 / (     $     " & 9 y  7   C L  k z j m m j h j s _ W [ ] z j j ] \ [ \ U Q P N M F D B L T w O R P T M G @ > = N Z 9 6 8 D J 5 7 7 1 , $ "     % '   ( .  0 f K   6 e R  e f j x n } { u ] ] Z T T [ o o \ ^ ] Y Z Y P Q Q V k K G E H I K L N L B @ < > @ O A 7 = E 8 6 5 . + . < [ ? e +          #       # d =  i g b c i k e _ ^ a \ [ Y V X Y [ ^ f R P Q T Y k r P Q J F F K I G E H T q I ; 9 < @ > > 7 6 5 2 4 @ V , * ) '                  2 z 2 F g b ^ [ ^ \ \ X \ j W W X W S P Q M J K L N P Q U Z t O D I N N O F E K B @ 4 5 5 8 A Q \ 3 / / / ( " # - R /        ) O 5      ' ^ ~ 1 Z Z \ Y Y Y W V T S Q S P O P M O Q N O U d X o Q H G H R ] V C F H A < C M C M ` { 3 4 8 9 + & ( ) & " !                   2 J > Z Y [ _ ] ` r T R Q R T P R U N M J J P K I K ^ Q O a H I F N @ ? > ; B P 6 9 8 ; 0 . / * & # " % % !  $  " 0 9   + * /   #      ] ` c j P M H H I J L M P P N M F D B B ? C H _ M ] J C @ B E F P p 0 - , . / 3 4 0 , ( & & # ! $        . I       L I R T N J J F G K T T R X o P Y \ B A F J L J B ? = : = 9 : < D K 8 9 7 @ C - 2 4 : K ) ) , 3 ; % '         0 B       h g P N L N M L M H E D J W T C F H J I F A ? > E U 2 0 3 6 6 5 7 > R Q 4 : + / ( * 3 P W 4 S v  , .      -    $ A      I L H K T U K K I N Q F E A A ? > B > = I b l ^ C C ; 6 3 1 2 , , + . ; 6 ' * . ) ) - '        1     +       { | z F F G I U A B = > F G H N b U I O f e 2 2 1 2 9 B L o E 4 7 / / ) ) ' & !   ! ' * 1 R #        " P %   % :  z G K P F G H J @ < ; 9 : = D H = < = : 9 7 6 5 6 , - / 1 3 + + - + / 0 ( % ' - % / # , V 2           8 @    } 5 5 6 9 > F T h = < > = 7 8 ; 5 0 7 6 5 2 8 ? \ } 5 4 : W # * / #             + A      v q n m D C < 9 ; ? Q u 4 9 ; < ? J m W J K E : O % ( ( & ( ' ( '        #          # ` L       y v s n i h 8 8 9 ? a W 8 J 5 . 5 N ? ( ( - 4 . , , * & % $        # 4 U     > m   & T q U (       &  } z w u u s t v t o l i d d 2 2 2 - . 4 3 % & ) . - 5 7 "  " ) : & #   #  ) 9 s %             0 T o     2   w l h d _ _ ] = ( ) . 8 B > 0 0 4 1 & $ !  % = ^  $ , , ? 1          C          ? *   ~ | y x v w v t e c ^ ^ _ . 8 V F   ! # # , #  " + 0 G      -     &        5 %   } z ~ x w z x u r q r i g d h v | u> ! * H 1                  4 4      #  u v | h j m j l q x Y \ Y S  (      & ,    " 0               ! z r k k k g b ] a a ^ ^ Y W S L J G 4       %   !         \  1  "  { } r r s l n j e f _ _ U R W ` H D  $         ' 5          D y x z y v w v m j g i h d a a ^ ^ \ V Y W R Z @ <               %  *   ~  ~ z w p q w h j b e g d ` ] ] i U O E E D E J C D ! 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D V D 8 5 7 < Q - 0 ) 2 ( /  % 9 M " " - "     h M =  e k  | w z j f f u g j i e ` ^ ] Z X W _ [ Y h t K R M O K K I F @ ; : 6 4 1 0 / / 0 , & ' ' !  ! % 7 Q G    '         Bs { z { u m h c i j h a a c a Y Y Z T X a j t b S T M K I K M C @ C A @ < 9 4 2 0 0 2 4 0 * & ' $ $ ' " ' ? 1 8 J ;           9h d d e f n x k k ~ ` h k a i Y Q U ] p  O M M _ F W M B I N ` O = 7 3 , ) & & ' ) - 0 ; \ r '          1       >  } { | t q j h j OV U R R T V ] \ j _ c a g ] X W g F I > S ` A B E d Z ] ~ 7 5 0 ) % # $ + 6 P . + ( #                I )  ~ s k c b f l b e f e f | r t3e N C ? F K H I N V O J E B A C P A = 4 / 1 / , 3 < A G D ? A 6 $     $ # + 0     " B I        # ~ z {   t 3-C